First Atomic resolution with the AFM demonstrated by T. Albrecht at Stanford
Noncontact AFM introduced
MFM invented
Park Scientific is founded by Stanford researchers
Topometrix is founded Burleigh Instruments offers SPM systems
Piezolevers are first introduced
Shear-force detection type NSOM/SNOM first introduced
ThermoSpectra acquires Park Scientific
WITec founded by Universität Ulm researchers
Nanosurf founded by Universität Basel researchers
Park Scientific Instruments Asia Founded (later renamed Park Systems)
Asylum Research founded by former Digital Instruments employees
JPK founded
Digital Instruments and TM Microscopes merged with Veeco Metrology Group.
Nanoscience Instruments Founded
Note: This list is by no means meant to be comprehensive.
TappingMode is a registered trademark of Digital Instruments, Veeco Metrology Group. MACMode is a registered trademark of Agilent.