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| FlexAFM Scanner specifications |
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| Sample Size |
Unlimited without sample stage
100 mm on sample stage |
| Maximum Petri dish height (fluid level) |
9 mm (6 mm) |
| Manual approach range |
30 mm |
Automatic approach range
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1.0 mm |
| Maximum scan range |
100 μm (1) |
Maximum Z-range
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10 μm (1) |
| Drive Z-resolution |
0.152 nm (2) |
| Drive XY-resolution |
1.525 nm (2) |
| XY-linearity mean error |
typ. 0.1% (max. 0.3%) |
| XY-flatness at maximum scan range |
typ. 5 nm (max. 15 nm) |
| Z-measurement noise level (RMS, Static Mode in air) |
typ. 0.20 nm |
| Z-measurement noise level (RMS, Dynamic Mode in air) |
typ. 0.16 nm |
| Scan head dimensions |
143 × 158 × 53 mm |
| Scan head weight |
1.25 kg |
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(1) Manufacturing tolerances are ± 5%
(2) Calculated by dividing the maximum range by 16 bits |
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| Imaging (check with us for controller requirements) |
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| Basic modes |
Static Force (Contact): Constant Force, Constant Height. |
| Dynamic modes |
Dynamic Force (Intermittent Contact, etc.): Constant Amplitude, Constant Height. |
Extended modes
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Spreading Resistance, Lateral Force.
Force Modulation, Phase Contrast, Magnetic/Electrostatic Force. |
| Data points |
Up to 2048 × 2048 points (individual width/height) |
| Scan modes |
Forward & backward scan / frame up, down, or continuous |
| Rotation and tilt |
0 – 360°, hardware X/Y-slope compensation |
| Data display |
User definable profile and color map charts for all channels |
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| Spectroscopy (check with us for controller requirements) |
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Basic modes
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Force-Distance, Force-Voltage |
| Dynamic modes |
Amplitude-Distance |
| Extended modes |
Phase-Distance, Current-Voltage, Current-Distance |
| Measurement positions |
Single X/Y point measurement or multiple measurements |
| Data points |
Up to 2048 points (up to 1024 averages) |
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| Lithography |
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| Automated drawing |
Vector graphic or bitmap graphic import |
| Manual drawing |
Freehand drawing / Real-time tip movement with mouse |
Lithography modes
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Static Force Lithography (multi-pass Lithography with re-imaging)
Dynamic Force Lithography (multi-pass Lithography with re-imaging) |
| Accessible parameters |
Tip speed, Setpoint, Tip voltage, Amplitude |
| Number of vectors |
Unlimited |
| Number of layers |
255 |
| CAD vector drawing |
Special CAD program included |
| Supported CAD formats |
GDS II, DXF, OASIS, CIF |
| Scripting interface |
Allows special user created drawing modes |
| Visualization |
Graphical preview of objects, Object moving, Object scaling, Real-time plot during drawing |
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