AFM Calibration Grids

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Our 32400 and 32100 calibration standards offer outstanding quality at a very low price and permit calibration of an AFM scanner in all three dimensions. These XYZ gratings are easy to use - no alignment or positioning is necessary - because the calibration area covers the entire 5 mm x 5 mm sample area. They feature a chessboard-like structure consisting of either a 2 µm square pattern with a 4 µm period (32400) or a 5 µm square pattern with a 10 µm period (32100). The structure step height is in the range of 25 nm. The grating is glued to a 10mm diameter steel disc with conductive epoxy.

Technical data:

Die size: 5 x 5 mm

Surface geometry: Square mesas with either a 4 µm or 10 µm pitch, arranged over the entire surface area.

Step height: ~ 25 nm


32400 (4 µm pitch w/ 2 µm mesas)



32100 (10 µm pitch w/ 5 µm mesas)